Nanoscale Fab Equipment Solutions
UHV & Precision Highlights
Vacuum Integrity Mastery
Specialized in machining components for Ultra-High Vacuum (UHV) environments. We ensure zero virtual leaks through optimized pocket design and achieve Ra 0.2 surface finishes to minimize outgassing in fab chambers.
Sub-Micron Flatness
For wafer-stage and lithography components, we maintain flatness and parallelism within 0.002mm across large surface areas, essential for maintaining focus-depth accuracy in nanometer nodes.
Ultra-Pure Material Control
Expert handling of high-purity aluminum, quartz, and engineering ceramics. Our processes eliminate cross-contamination, ensuring that every part meets the stringent cleanliness required for front-end fab operations.
Product Range
Semiconductor Fab Hardware
Wafer Handling End-Effectors
High-stiffness arms for high-speed wafer transport robots. Machining light-weight, ceramic-coated or ESD-safe components designed for minimal particle generation and maximum positional speed.
Al-Si-SiC Composite Mastery
Integrated Vacuum Suction Paths
Vibration-Damped Architectures
UHV Chamber Interior Components
Process-critical liners, gas distribution plates (showerheads), and cathode housings. Machined from high-purity materials with verified micro-grain structures for consistent plasma behavior.
High-Purity 6061/7075 Aluminum
Complex Micro-Hole Drilling
Electro-Polished Internal Radii
Precision Lithography Frames
Massive, high-stability structural supports for optical stages. We focus on thermal stability and vibration isolation, machining large-scale blocks with sub-micron repeatable datums.
Invar & Low-Expansion Alloys
Master-Datum Alignment ±5μm
Stress-Relieved Large Machining
Nanoscale Machining Mastery
Sub-Micron Coordinate Metrology
Utilizing air-bearing CMMs and laser interferometers to verify geometric tolerances that are invisible to the naked eye but critical for silicon wafer alignment.
Exotic Fab Material Mastery
Years of experience machining brittle or reactive materials like Quartz, Silicon Carbide, and Engineering Ceramics using specialized diamond tooling and ultra-stable spindles.
Cleanroom Surface Preparation
Integrated ultrasonic cleaning and chemical passivation protocols specifically designed to meet the particle-count standards of ISO Class 5 fab environments.
Production Process
Nanoscale Excellence: From Silicon Blueprint to Particle-Free Delivery
Precision Design Review
Our engineers analyze CAD files for thermal drift potential and vacuum seal integrity, optimizing layouts for sub-micron stability.
High-Purity Sourcing
Procuring source-verified materials with full outgassing profiles. We ensure that raw stock is free from chemical inclusions that could contaminate the fab.
Ultra-Stable Pathing
CAM pathing designed for minimum thermal input, preventing material expansion and ensuring the highest level of surface flatness on critical stages.
Non-Marring Workholding
Using polymer-tipped fixtures and non-contaminating vacuum chucks to secure delicate fab parts without introducing trace-metal transfer.
High-RPM Precision Cutting
Executing sub-micron features using high-frequency spindles and oil-free MQL lubrication systems to maintain purity during the cut.
Coordinate Metrology Audit
100% inspection of critical datums. We utilize automated CMM sequences to verify parallelism and flatness across the entire batch.
Cleanroom de-Contamination
Multi-stage ultrasonic cleaning in deionized water, followed by vacuum baking to ensure components arrive with zero manufacturing residual.
Vacuum-Sealed Delivery
Parts are double-bagged in cleanroom environments with full documentation: Vacuum leak test certificates, purity logs, and CMM reports included.
Company Overview
We're an ISO 9001:2015 certified CNC machining manufacturer. With years of experience, we deliver quality parts on time and within budget. Our advanced facilities handle small - batch to large - scale projects. We keep investing in tech to meet customer needs.
Contact Us
If you have questions, need a quote, or want to order, contact our customer service.
Email: your_email@example.com
Phone:+86-755 27460192
